Precursor
相關資料
❮ Silicon ❯
BTBAS / BDEAS / 4MS
OMCTS / DIPAS / TEOS
DEMS / ATRP / DIS (P41)
HCDS / TrisDMAS
❮ High–K ❯
HfCl₄ / TEMAHf / TEMAZr
TiCl₄ / TDMAHf / TDMAZr
CpHf / CpZr
❮ Metal ❯
PDMAT
TDMAT
TMA
❮ Silicon ❯
BTBAS / BDEAS / 4MS
OMCTS / DIPAS / TEOS
DEMS / ATRP / DIS (P41)
HCDS / TrisDMAS
❮ High–K ❯
HfCl₄ / TEMAHf / TEMAZr
TiCl₄ / TDMAHf / TDMAZr
CpHf / CpZr
❮ Metal ❯
PDMAT
TDMAT
TMA